A gas panel is a term of art in the semiconductor equipment (tool) and semiconductor processing industry. Engineers refer to the box that controls the gases to a semiconductor processing chamber as a “gas panel.” One way to think about it is to consider a system's gas panel to be its “control panel” for the gases.Jul 16, 2015
What is UHP gas?
Ultra-high purity (UHP) gas panels provide safe, efficient distribution of process gases when system cleanliness and product purity are critical. ... Sensitive applications require that source gases—and the systems they travel through—stay pure and free of contaminants.
What is ultra high purity gas used for?
Ultra high purity gases (they have low amounts of other gases) are often used in high-tech industries like the analytical, pharmaceutical, petrochemical, semiconductor, metrology and aerospace industries. Pure gases often improve yields, consistency or improve the quality of the end product.
What is UHP grade?
What Is Ultra High Purity (UHP) Nitrogen Gas? Ultra-high purity nitrogen gas refers to a nitrogen gas concentration of 99.999% with negligible impurities.